Study of deposition and post-oxidation of d.c. magnetron sputtered W/Fe bilayers

Surface and Coatings Technology

Volumn 200, Issue 1-4 SPEC. ISS., 2005, Pages 408-412

  Plantin, Pascale ^a   Thomann, A L ^a   Brault, P ^a   Dumax, B ^a   Mathias, J ^a   Sauvage, T ^b   Pineau, A ^a  

^a UNIVERSITÉ D'ORLÉANS   (France)

^b Laboratoire de Physique et Chimie de l'Environnement   (France)

Author keywords

Iron; Iron oxide; Magnetron; Multilayer; Sputtering; Tungsten

Indexed keywords

ADHESIVES; GRAIN SIZE AND SHAPE; IRON; IRON OXIDES; MAGNETRON SPUTTERING; METALLIC FILMS; OXIDATION; SPUTTER DEPOSITION; STRUCTURE (COMPOSITION); SURFACE REACTIONS; TUNGSTEN;

ADHESIVE FILMS; BILAYER DEPOSITION PARAMETERS; BILAYER METALLIC COATINGS; BILAYERS;

MULTILAYERS;

OXIDATION;

EID: 24644482418     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.01.055     Document Type: Article

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