High-precision optical heterodyne interferometric dilatometer for determining absolute CTE of EUVL materials

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5751, Issue II, 2005, Pages 1069-1076

  Takeichi, Yoshimasa ^a   Nishiyama, Iwao ^a   Yamada, Naofumi ^b  

^a ASSOCIATION OF SUPER ADVANCED ELECTRONICS TECHNOLOGIES ASET   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

CTE; EUVL; LTEM; Optical heterodyne interferometer; Optics, mask substrate

Indexed keywords

INTERFEROMETERS; MASKS; OPTICAL RESOLVING POWER; SUBSTRATES; THERMAL EXPANSION; ULTRAVIOLET RADIATION;

CTE; EUVL; LTEM; OPTICAL HETERODYNE INTERFEROMETER; OPTICS, MASK SUBSTRATE;

LITHOGRAPHY;

EID: 24644463209     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.599400     Document Type: Conference Paper

References (11)

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