Double-grating lateral shearing interferometer for EUV optics At-wavelength measurement

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5752, Issue II, 2005, Pages 663-672

  Liu, Zhiqiang ^a   Okada, Masashi ^a   Sugisaki, Katsumi ^a   Ishii, Mikihiko ^a   Zhu, Yucong ^a   Ohtaki, Katsura ^a   Saito, Jun ^a   Suzuki, Akiyosi ^a   Hasegawa, Masanobu ^a   Ohuchi, Chidane ^a   Kato, Seima ^a   Niibe, Masahito ^b   Murakami, Katsuhiko ^a  

^a Extreme Ultra Violet Lithography System Development Association   (Japan)

^b UNIVERSITY OF HYOGO   (Japan)

Author keywords

Calibration; Diffraction; DLSI; EUVL; Grating; Interferometer; Metrology; Shearing interferometer

Indexed keywords

DIFFRACTION GRATINGS; ERROR ANALYSIS; POLYNOMIALS; ULTRAVIOLET RADIATION; WAVEFRONTS;

DOUBLE-GRATING LATERAL SHEARING INTERFEROMETERS (DLSI); LATERAL SHEARING INTERFEROMETERS (LSI); PHASE DISTRIBUTIONS; ZERNIKE-POLYNOMIALS;

INTERFEROMETERS;

EID: 24644459361     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.599456     Document Type: Conference Paper

References (5)

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