Precision carbon nanotube tip for critical dimension measurement with atomic force microscope

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5752, Issue I, 2005, Pages 412-419

  Park, B C ^a   Jung, K Y ^b   Hong, J ^b   Song, W Y ^c   B h, O ^c   Kim, J A ^a  

^a Korea Research Institute of Standards and Science   (South Korea)

^b Creative Nano Instrument   (South Korea)

^c Inha University   (South Korea)

Author keywords

Atomic force microscope(AFM); Carbon nanotube(CNT) tip; Focused ion beam(FIB); Nano manipulation

Indexed keywords

CARBON NANOTUBES; ELASTICITY; ELECTRON MICROSCOPY; IMAGE ANALYSIS; ION BEAMS; SCANNING ELECTRON MICROSCOPY; SILICON;

CARBON NANOTUBE CNT) TIPS; FOCUSED-ION BEAMS; NANO-MANIPULATION; SILICON TIPS;

ATOMIC FORCE MICROSCOPY;

EID: 24644453632     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.599245     Document Type: Conference Paper

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