DC thermal plasma CVD synthesis of coatings from liquid single source SiBCN and SiCNTi precursors

Surface and Coatings Technology

Volumn 200, Issue 1-4 SPEC. ISS., 2005, Pages 612-615

  Wilden, Johannes ^a   Wank, Andreas ^b   Bykava, Alena ^b  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

^b CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Amorphous B ; X Si B C N D ; X Si C N Ti D ; X thermal plasma C ; X TPCVD C ; X vacuum plasma spraying C

Indexed keywords

BORIDES; COATINGS; DEPOSITION; MORPHOLOGY; NITRIDES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA JETS; PLASMA SPRAYING; PLASMA TORCHES; STEEL; SYNTHESIS (CHEMICAL); VISCOSITY;

DC THERMAL PLASMA CVD SYNTHESIS; LIQUID SINGLE SOURCE; VACUUM PLASMA SPRAYING;

SILICON COMPOUNDS;

COATING;

EID: 24644436836     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.01.027     Document Type: Article

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