Confocal measurement approach for enhancing lateral resolution using a phase-only pupil

Journal of Physics: Conference Series

Volumn 13, Issue 1, 2005, Pages 422-425

  Qiu, L R ^a   Ding, X M ^a   Liu, J ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 24644434490     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/13/1/097     Document Type: Conference Paper

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