Electrical and optical properties of new transparent conducting oxide In 2O 3:Ta thin films

Journal of the Korean Physical Society

Volumn 44, Issue 4, 2004, Pages 956-961

  Ju, Honglyoul ^a   Hwang, Seokmin ^a   Jeong, Chang Oh ^b   Park, Changwoo ^c   Jeong, Eunhee ^a   Park, Seung Han ^a  

^a Yonsei University   (South Korea)

^b SAMSUNG Electronics   (South Korea)

^c Hanbat National University   (South Korea)

Author keywords

Magnetron sputtering; Ta doped In 2O 3; Transparent conducting oxide

Indexed keywords

EID: 2442602186     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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