Nanoindentation characteristics on polycarbonate polymer film

Microelectronics Journal

Volumn 35, Issue 7, 2004, Pages 595-599

  Fang, Te Hua ^a   Chang, Win Jin ^b  

^a SOUTHERN TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^b KUN SHAN UNIVERSITY   (Taiwan)

Author keywords

Creep; Effective elastic modulus; Hardness; Nanoindentation; Polymer

Indexed keywords

CREEP; ELASTIC MODULI; HARDNESS; NUMERICAL ANALYSIS; PLASTIC DEFORMATION; POISSON RATIO; THIN FILMS; VISCOELASTICITY;

EFFECTIVE ELASTIC MODULUS; NANOINDENTATION; NANOSCRATCH TESTS; POLYCARBONATE POLYMER FILMS;

POLYCARBONATES;

EID: 2442597783     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2004.02.004     Document Type: Article

References (17)

1. Pharr G.M., Oliver W.C., Brotzen F.R. J. Mater. Res. 7:(3):1992;613.
2. Oliver W.C., Pharr G.M. J. Mater. Res. 7:(6):1992;1564.
3. Sneddon I.N. Int. J. Engng Sci. 3:1965;47.
4. Harding D.S., Oliver W.C., Pharr G.M. Mater. Res. Symp. Proc. 356:1995;663.
5. Li X., Bhushan B. Thin Solid Films. 315:1998;214.
6. Alba S., Loubet J.L., Vovelle L. J. Adhes. Sci. Technol. 7:(2):1993;131.
7. Bahr D.F., Hoehn J.W., Moody N.R., Gerberich W.W. Acta Mater. 45:(12):1997;5163.
8. Poisl W.H., Oliver W.C., Fabes B.D. J. Mater. Res. 10:(8):1995;2024.
9. Lucas B.N., Oliver W.C. Metall. Mater. Trans. A. 30A:1999;601.
10. Chudoba T., Richter F. Surf. Coat. Technol. 148:2001;191.
11. Chen J.S., Duh J.G. Surf. Coat. Techol. 139:2001;6.
12. Liu Y., Ngan A.H.W. Scripta Mater. 44:2001;237.
13. Ichimura H., Ando I. Surf. Coat. Technol. 145:2001;88.
14. Thurn J., Morris D.J., Cook R.F. J. Mater. Res. 17:(10):2002;2679.
15. Fang T.H., Chang W.J. Microelectron. Engng. 65:2003;231.
16. Beake B.D., Leggett G.J. Polymer. 43:2002;319.
17. Ngan A.H.W., Tang B. J. Mater. Res. 17:(10):2002;2604.