Optimum growth conditions of Ge-Sb-Te alloy thin film investigated by ellipsometry

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 3, 2004, Pages 1006-1012

  An, Sung Hyuck ^a   Li, Xuezhe ^a   Kim, Sang Youl ^a  

^a Ajou University   (South Korea)

Author keywords

Ellipsometry; Ge Sb Te; Optical recording; Phase change; Uniform film growth

Indexed keywords

COMPACT DISK PLAYERS; ELLIPSOMETRY; FLOPPY DISK STORAGE; GERMANIUM ALLOYS; KINETIC ENERGY; OPTICAL RECORDING; RARE EARTH ALLOYS; SCANNING ELECTRON MICROSCOPY; SPUTTERING; STOICHIOMETRY; VIDEODISKS;

FILM MICROSTRUCTURE; PHASE CHANGE; THREE FILM MODEL (TFM);

THIN FILMS;

EID: 2442503901     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.1006     Document Type: Article

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