Fracture patterns in thin films and multilayers

Materials Research Society Symposium - Proceedings

Volumn 795, Issue , 2003, Pages 81-86

  Volinsky, Alex A ^a   Meyer, Dirk C ^b   Leisegang, Tilmann ^b   Paufler, Peter ^b  

^a University of South Florida   (United States)

^b DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BUCKLING; DELAMINATION; FRACTURE; MORPHOLOGY; MULTILAYERS; RESIDUAL STRESSES; STRESS RELIEF; TENSILE STRESS;

DUNDURS PARAMETERS; STONEY'S EQUATION; STRAIN ENERGY; SUBSTRATE BENDING;

THIN FILMS;

EID: 2442482696     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-795-u3.8     Document Type: Conference Paper

References (28)

1. G.G. Stoney, Proc. Roy. Soc. Lond. A82, 172 (1909)
2. M.D. Thouless, J. Vac. Sci. Technol. A 9(4), 2510-2515 (1991)
3. J.W. Hutchinson; Z. Suo, Advances in Applied Mechanics 29, 63-191 (1992)
4. J.L. Beuth, Int. J. Solids Struct. 29, 1657 (1992)
5. J. Malzbender, G. de With, Thin Solid films 359, 210-214 (2000)
6. A. Groisman, E. Kaplan, Europhys. Lett. 25(6), 415-420 (1994)
7. A.A. Volinsky and W.W. Gerberich, Microelectronic Engineering 69/2-4, 519-527 (2003)
8. K.A. Shorlin, J. R. de Bruyn, Phys. Rev. E 61(6), 6950 (2000)
9. A.T. Skjeltorp, P. Meakin, Lett. to Nature 335, 424 (1988)
10. M.D. Thouless, J. Am. Ceram. Soc. 73, 2144 (1990)
11. T. Bai, D.D. Pollard, H. Gao, Lett. to Nature 403, 753 (2000)
12. R. Huang, J.H Prevost, Z. Y. Huang, Z. Suo, Eng. Fract. Mech. 70, 2513 (2003)
13. Z. Neda, K.-t. Leung, L. Jozsa, M. Ravasz, Phys Rev. Lett. 88(9), 95502 (2002)
14. A. Argon, Proc. Roy. Soc. A250, 472-481 (1959)
15. Z.C. Xia, J.W. Hutchinson, J. Mech. Phys. Solids 48, 1107-1131 (2000)
16. D.C. Meyer, T. Leisegang, A.A. Levin, P. Paufler, A.A. Volinsky, Appl. Phys. A 78, 303305 (2004)
17. A. Yuse, M. Sano, Nature 362, 329 (1993)
18. B. Cotterell, Z. Chen, Int. J. of Fractrure, 104, 169 (2000)
19. A.A. Volinsky, N.R. Moody, W.W. Gerberich, Acta Mater. 50(3), 441 (2002)
20. A.A. Volinsky, N.R. Moody, M.L. Kottke, W.W. Gerberich, Philosophical Magazine A, 82 (2002)
21. N. Matuda, S. Baba, A. Kinbara, Thin Solid Films 81, 301 (1981)
22. G. Gille, B. Rau, Thin Solid films 120, 109 (1984)
23. J. Seth, R. Raghunath, S.V. Babu, J. Vac. Sci. Technol. A 10(2) (1992)
24. M.-W. Moon, H.M. Jensen, J.W. Hutchinson, K.H. Oh, A.G. Evans, J. Mech. Phys Solids, 50(11), 2355 (2002)
25. A.A. Volinsky, Mat. Res. Soc. Symp. Proc. 749, W10.7 (2003)
26. http://www.eng.usf.edu/~volinsky
27. J. Liang, R. Huang, H. Yin, J.C. Sturm, K.D. Hobart, Z. Suo, Acta Mater. 50, 2933 (2002)
28. A.A. Volinsky, et. al., to be published