Fast nondestructive technique to determine the content of components in a strain-compensated crystalline ternary alloy

Journal of Applied Physics

Volumn 95, Issue 9, 2004, Pages 5249-5251

  Nikulin, A Y ^a   Zaumseil, P ^b  

^a MONASH UNIVERSITY   (Australia)

^b IHP   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; AUGER ELECTRON SPECTROSCOPY; CRYSTAL LATTICES; DERIVATIVES; FOURIER TRANSFORMS; INTEGRATION; LAPLACE TRANSFORMS; NONDESTRUCTIVE EXAMINATION; SECONDARY ION MASS SPECTROMETRY; SINGLE CRYSTALS; STRAIN; SUBSTRATES; TERNARY SYSTEMS; X RAY DIFFRACTION ANALYSIS;

BRAGG DIFFRACTION; STRAIN COMPENSATION; X-RAY PHASE RETRIEVAL METHOD;

SILICON ALLOYS;

EID: 2442424220     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1695592     Document Type: Article

References (10)

1. H. J. Osten, H. P. Zeindl, and E. Bugiel, J. Cryst. Growth 143, 194 (1994).
2. M. A. Herman, Cryst. Res. Technol. 34, 583 (1999).
3. K. Brunner, O. G. Schmidt, W. Winter, K. Eberl, M. Gluck, and U. Konig, J. Vac. Sci. Technol. B 16, 1701 (1998).
4. H. J. Osten, E. Bugiel, and P. Zaumseil, Appl. Phys. Lett. 64, 3440 (1994).
5. P. Zaumseil, J. Phys. D 32, A75 (1999).
6. A. Y. Nikulin, Phys. Rev. B 57, 11178 (1998).
7. A. Y. Nikulin and R. Steinfeld (unpublished).
8. A. Y. Nikulin, A. W. Stevenson, and H. Hashizume, Phys. Rev. B 53, 8277 (1996).
9. R. N. Bracewell, The Fourier Transform and Its Applications (McGraw-Hill, New York, 1986).
10. A. Y. Nikulin, J. R. Davis, N. T. Jones, and P. Zaumseil, J. Appl. Phys. 84, 4815 (1998).