Phase-shifting method contrast calculations in time-averaged interferometry: Error analysis

Optical Engineering

Volumn 44, Issue 6, 2005, Pages 1-14

  Patorski, Krzysztof ^a   Slenicki, Zbigniew ^a   Styk, Adam ^a  

^a WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Automatic fringe pattern analysis; Optical testing methods; Silicon microelements; Time averaged interferometry; Vibration studies

Indexed keywords

ALGORITHMS; BESSEL FUNCTIONS; COMPUTER SIMULATION; ERROR ANALYSIS; LIGHT MODULATION; OPTICAL TESTING; PHASE SHIFT; SILICON; VIBRATIONS (MECHANICAL);

AUTOMATIC FRINGE PATTERN ANALYSIS; SILICON MICROELEMENTS; TIME AVERAGED INTERFEROMETRY;

INTERFEROMETRY;

EID: 24344499780     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1926887     Document Type: Article

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