Enhanced dielectric properties of modified Ta2O5 thin films

Materials Research Innovations

Volumn 2, Issue 5, 1999, Pages 299-302

  Desu, Chandra S ^a   Joshi, Pooran C ^a   Desu, Seshu B ^a  

^a State University   (United States)

Author keywords

Dielectric properties; Insulating properties; Tantalum oxide; Thin film

Indexed keywords

EID: 0001325239     PISSN: 14328917     EISSN: None     Source Type: Journal    
DOI: 10.1007/s100190050101     Document Type: Article

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