-
1
-
-
33645481720
-
-
2nd Edition, R. M. Oswood, Ed., Springer-Verlag, Germany
-
S. M. Metev and V. P. Veiko, in Laser Assisted Microtechnology, 2nd Edition, R. M. Oswood, Ed., pp. 76-79, Springer-Verlag, Germany (1998).
-
(1998)
Laser Assisted Microtechnology
, pp. 76-79
-
-
Metev, S.M.1
Veiko, V.P.2
-
2
-
-
1842532620
-
"Influence of femtosecond laser parameters on the fabrication of photomask by direct ablation"
-
P. Stanley, K. Venkatakrishnan, and L. Lim, "Influence of femtosecond laser parameters on the fabrication of photomask by direct ablation," Lasers Eng. 13(1), 13-23 (2003).
-
(2003)
Lasers Eng.
, vol.13
, Issue.1
, pp. 13-23
-
-
Stanley, P.1
Venkatakrishnan, K.2
Lim, L.3
-
3
-
-
11344260630
-
"Laser micromachining for microfluidic, microelectronic and MEMS applications"
-
July 20-23, Banff, Alberta, Canada
-
R. Fedosejevs, M. Argument, A. Sardarli, S. E. Kirkwood, R. Holenstein, and Y. Y. Tsui, "Laser micromachining for microfluidic, microelectronic and MEMS applications," in Proc. Int. Conf. on MEMS, NANO and Smart Systems, July 20-23, Banff, Alberta, Canada, p. 53 (2003).
-
(2003)
Proc. Int. Conf. on MEMS, NANO and Smart Systems
, pp. 53
-
-
Fedosejevs, R.1
Argument, M.2
Sardarli, A.3
Kirkwood, S.E.4
Holenstein, R.5
Tsui, Y.Y.6
-
4
-
-
0002939071
-
"Advanced lasers for photonic device microfabrication"
-
P. R. Herman, K. P. Chen, P. Corkum, A. Naumov, S. Ngi, and J. Zhang, "Advanced lasers for photonic device microfabrication," RIKEN Rev. 32, 31-35 (2001).
-
(2001)
RIKEN Rev.
, vol.32
, pp. 31-35
-
-
Herman, P.R.1
Chen, K.P.2
Corkum, P.3
Naumov, A.4
Ngi, S.5
Zhang, J.6
-
5
-
-
0010957779
-
"Laser cutting of slotted tube coronary stents - State-of-the-art and future developments"
-
C. Momma, U. Knop, and S. Nolte, "Laser cutting of slotted tube coronary stents - state-of-the-art and future developments," Progr. Biomed. Res. 4(1), 39-44 (1999).
-
(1999)
Progr. Biomed. Res.
, vol.4
, Issue.1
, pp. 39-44
-
-
Momma, C.1
Knop, U.2
Nolte, S.3
-
6
-
-
17144448749
-
"Femtosecond lasers as novel tool in dental surgery"
-
J. Servin, T. Bauer, and C. Fallnich, "Femtosecond lasers as novel tool in dental surgery," Appl. Surf. Sci. 197, 737-740 (2002).
-
(2002)
Appl. Surf. Sci.
, vol.197
, pp. 737-740
-
-
Servin, J.1
Bauer, T.2
Fallnich, C.3
-
7
-
-
0029219497
-
"Machining of sub-micron holes using femtosecond laser at 800 nm"
-
P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, "Machining of sub-micron holes using femtosecond laser at 800 nm," Opt. Commun. 114, 106-110 (1995).
-
(1995)
Opt. Commun.
, vol.114
, pp. 106-110
-
-
Pronko, P.P.1
Dutta, S.K.2
Squier, J.3
Rudd, J.V.4
Du, D.5
Mourou, G.6
-
8
-
-
0000134647
-
"Microscopic processes in dielectrics under irradiation by subpicosecond laser pulses"
-
A. Kaiser, B. Rethfeld, M. Vicanek, and G. Simon, "Microscopic processes in dielectrics under irradiation by subpicosecond laser pulses," Phys. Rev. B 61(17), 11437-11450 (2000).
-
(2000)
Phys. Rev. B
, vol.61
, Issue.17
, pp. 11437-11450
-
-
Kaiser, A.1
Rethfeld, B.2
Vicanek, M.3
Simon, G.4
-
9
-
-
85076790798
-
"Dynamics and mechanism of discrete etching of organic materials by femtosecond laser excitation"
-
Y. Hosokawa, M. Yashiro, T. Asahi, and H. Masuhara, "Dynamics and mechanism of discrete etching of organic materials by femtosecond laser excitation," in Laser Applications in Microelectronic and Optoelectronic Manufacturing VI, Proc. SPIE 4274, 78-87 (2001).
-
(2001)
Laser Applications in Microelectronic and Optoelectronic Manufacturing VI, Proc. SPIE
, vol.4274
, pp. 78-87
-
-
Hosokawa, Y.1
Yashiro, M.2
Asahi, T.3
Masuhara, H.4
-
10
-
-
0030211787
-
"Femtosecond, picosecond and nanosecond laser ablation of solids"
-
B. N. Chichkov, C. Momma, S. Nolte, F. Von Alvensleben, and A. Tünnermann, "Femtosecond, picosecond and nanosecond laser ablation of solids," Appl. Phys. A: Solids Surf. 63, 109-115 (1996).
-
(1996)
Appl. Phys. A: Solids Surf.
, vol.63
, pp. 109-115
-
-
Chichkov, B.N.1
Momma, C.2
Nolte, S.3
Von Alvensleben, F.4
Tünnermann, A.5
-
11
-
-
0034499235
-
"Surface and bulk ultrashort pulsed laser processing of transparent materials"
-
I. V. Hertel, "Surface and bulk ultrashort pulsed laser processing of transparent materials," Proc. SPIE 4088, 17-24 (2000).
-
(2000)
Proc. SPIE
, vol.4088
, pp. 17-24
-
-
Hertel, I.V.1
-
12
-
-
2342487387
-
"Fabrication of volume grating induced in silica glass by femtosecond laser"
-
K. Yamada, W. Watanabe, K. Kintaka, J. Nishii, and K. Itoh, "Fabrication of volume grating induced in silica glass by femtosecond laser," Proc. SPIE 5063, 474-477 (2003).
-
(2003)
Proc. SPIE
, vol.5063
, pp. 474-477
-
-
Yamada, K.1
Watanabe, W.2
Kintaka, K.3
Nishii, J.4
Itoh, K.5
-
13
-
-
0000294356
-
"High precision drilling with short pulsed solid-state lasers"
-
November 15-17, Orlando, Florida
-
T. Abeln, J. Radtke, and F. Dausinger, "High precision drilling with short pulsed solid-state lasers," in Proc. Laser Microfabrication Conf. ICALEO 99, November 15-17, Orlando, Florida, Vol. 88, pp. 195-203 (2000).
-
(2000)
Proc. Laser Microfabrication Conf. ICALEO 99
, vol.88
, pp. 195-203
-
-
Abeln, T.1
Radtke, J.2
Dausinger, F.3
-
14
-
-
0033555467
-
"Microfluidic diffusion-based separation and detection"
-
B. H. Weigl and P. Yager, "Microfluidic diffusion-based separation and detection," Science 283, 346-347 (1998).
-
(1998)
Science
, vol.283
, pp. 346-347
-
-
Weigl, B.H.1
Yager, P.2
-
15
-
-
0031783806
-
"Miniaturization of analytical systems"
-
L. J. Kricka, "Miniaturization of analytical systems," Clin. Chem. 44, 2008-2014 (1998).
-
(1998)
Clin. Chem.
, vol.44
, pp. 2008-2014
-
-
Kricka, L.J.1
-
16
-
-
21544455278
-
"UV laser machined polymer substrates for the development of microdiagnostic systems"
-
M. A. Roberts, J. S. Rossier, P. Bercier, and H. Girault, "UV laser machined polymer substrates for the development of microdiagnostic systems," Anal. Chem. 69, 2035-2042 (1997).
-
(1997)
Anal. Chem.
, vol.69
, pp. 2035-2042
-
-
Roberts, M.A.1
Rossier, J.S.2
Bercier, P.3
Girault, H.4
-
17
-
-
0042040751
-
2 laser micromachining and back-end processing for rapid production of PMMA-based microfluidics systems"
-
2 laser micromachining and back-end processing for rapid production of PMMA-based microfluidics systems," Lab Chip 2, 242-246 (2002).
-
(2002)
Lab Chip
, vol.2
, pp. 242-246
-
-
Klank, H.1
Kutter, J.P.2
Geschke, O.3
-
18
-
-
0035504752
-
"Ultra-short high intensity laser pulse generation and amplification"
-
G. Chériaux and J. P. Chambaret, "Ultra-short high intensity laser pulse generation and amplification," Meas. Sci. Technol. 12, 1769-1776 (2001).
-
(2001)
Meas. Sci. Technol.
, vol.12
, pp. 1769-1776
-
-
Chériaux, G.1
Chambaret, J.P.2
-
19
-
-
0036386104
-
"Precision drilling of metals and ceramics with short and ultrashort pulsed solid-state lasers"
-
44261
-
C. Föhl, D. Breitling, K. Jasper, J. Radtke, and F. Dausinger, "Precision drilling of metals and ceramics with short and ultrashort pulsed solid-state lasers," Proc. SPIE 44261, 104-107 (2002).
-
(2002)
Proc. SPIE
, pp. 104-107
-
-
Föhl, C.1
Breitling, D.2
Jasper, K.3
Radtke, J.4
Dausinger, F.5
-
20
-
-
0001138816
-
"Anodic wafer bonding"
-
The Electrochemical Society, Pennington, NJ
-
E. Obermeier, "Anodic wafer bonding," in Proc. 3rd Int. Symp. on Semiconductor Wafer Bonding: Science, Technology and Applications, Vol. 95-7, pp. 212-220, The Electrochemical Society, Pennington, NJ (1995).
-
(1995)
Proc. 3rd Int. Symp. on Semiconductor Wafer Bonding: Science, Technology and Applications
, vol.95-97
, pp. 212-220
-
-
Obermeier, E.1
-
21
-
-
0000518739
-
"LIGA technologies and applications"
-
(Apr.)
-
J. Hruby, "LIGA technologies and applications," MRS Bull., pp. 1-4 (Apr. 2001).
-
(2001)
MRS Bull.
, pp. 1-4
-
-
Hruby, J.1
|