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Volumn 44, Issue 6 A, 2005, Pages 3774-3777

Workfunction tuning using various impurities for fully silicided NiSi gate

Author keywords

Impurity; Nickel; Pileup; Snowplow; Suicide; Workfunction

Indexed keywords

ANTIMONY; CAPACITANCE; ELECTRIC POTENTIAL; NICKEL COMPOUNDS; THERMAL EFFECTS;

PILEUP; SNOWPLOW; WORKFUNCTION;

IMPURITIES;

EID: 23944510634 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/JJAP.44.3774 Document Type: Article

Times cited : (19)

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