Linear viscoelasticity in aluminum thin films

Applied Physics Letters

Volumn 87, Issue 6, 2005, Pages

  Hyun, Seungmin ^a   Hooghan, Tejpal K ^a,b   Brown, Walter L ^a   Vinci, Richard P ^a  

^a Lehigh University   (United States)

^b TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BULGE SYSTEMS; LINEAR VISCOELASTICITY; MICROELECTROMECHANICAL SYSTEMS; POLYMER SYSTEMS;

ALUMINUM; CAPACITANCE; ELASTIC MODULI; METALLIC FILMS; MICROELECTROMECHANICAL DEVICES; POLYMERS; VISCOELASTICITY;

THIN FILMS;

EID: 23944488825     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2008383     Document Type: Article

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