Anelastic properties of aluminum thin films on silicon cantilevers

Journal of Alloys and Compounds

Volumn 310, Issue 1-2, 2000, Pages 449-453

  Harms, U ^a   Klose, F ^a   Neuhauser H ^a   Fricke, K ^a   Peiner, E ^a   Schlachetzki, A ^a  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANELASTIC RELAXATION; BENDING STRENGTH; CANTILEVER BEAMS; DAMPING; ELASTIC MODULI; GRAIN BOUNDARIES; METALLOGRAPHIC MICROSTRUCTURE; SILICON COMPOUNDS; THIN FILMS;

SILICON CANTILEVERS;

METALLIC FILMS;

EID: 0034271298     PISSN: 09258388     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-8388(00)01016-1     Document Type: Article

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