Defects and morphological changes in nanothin Cu films on polycrystalline Mo analyzed by thermal helium desorption spectrometry

Journal of Applied Physics

Volumn 98, Issue 2, 2005, Pages

  Venugopal, V ^a   Seijbel, L J ^a,b   Thijsse, B J ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b BRUKER AXS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON DEPOSITION SPECTRA; HELIUM TRAPPING; ISLAND FORMATION; THERMAL HELIUM DESORPTION SPECTROMETRY (THDS);

ACTIVATION ENERGY; COPPER; DESORPTION; GRAIN BOUNDARIES; HELIUM; ION IMPLANTATION; METALLIC FILMS; NANOSTRUCTURED MATERIALS; SPECTROSCOPY; THERMOANALYSIS; THERMODYNAMIC STABILITY; ULTRAHIGH VACUUM;

THIN FILMS;

EID: 23844542214     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1925765     Document Type: Article

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