Argon-surface interactions in IBAD-deposited molybdenum films

Materials Research Society Symposium - Proceedings

Volumn 504, Issue , 1999, Pages 57-62

  Van Der Kuur, Jan ^a   Korevaar, Bas ^a   Pols, Martin ^a   Van Der Linden, Jacqueline ^a   Thijsse, Barend ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; DEFECTS; DEPOSITION; ION BEAMS; ION IMPLANTATION; MOLYBDENUM; SUBSTRATES; SURFACE PHENOMENA;

ION BEAM ASSISTED DEPOSITION (IBAD);

METALLIC FILMS;

EID: 0032648294     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)