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Volumn , Issue , 2003, Pages 737-743

Integration of atomic layer deposition of TaN barriers in dual damascene SiOC

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER DEPOSITION (ALD); CONFORMATION DEPOSITION; DAMASCENE; TAN BARRIERS;

EID: 23844525132     PISSN: 15401766     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (9)

References (6)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.