Straight crested wave analysis of quartz MEMS ring electroded mesa resonators

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 2002, Pages 999-1002

  Yong, Yook Kong ^a   Vig, John ^b   Ballato, Arthur ^b  

^a Rutgers University   (United States)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC IMPEDANCE; CALCULATIONS; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; ELECTRODES; FINITE ELEMENT METHOD; INVERSE PROBLEMS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; SHEAR STRESS; VIBRATIONS (MECHANICAL); WAVEFORM ANALYSIS;

ELECTRIC FLUX DENSITY; MOTIONAL IMPEDANCE; QUARTZ RESONATOR; ROOT MEAN SQUARES;

ACOUSTIC RESONATORS;

EID: 0036995396     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)

1. "Surface charge measurement/calculations for the prediction of spurious modes and frequency jumps in AT-cut quartz resonators", T. Imai, M. Tanaka and Y-K Yong, Proceedings of the 2001 IEEE International Frequency Control Symposium, 2001, pp. 616-628.
2. Improvement of frequency drift of At-cut resonators using an unelectroded resonator region, K. Hirama, H. Konno, K. Asao and K. Nakamura, Proceedings of the 31st EM Symposium, Japan May 2002, pp. 7-12.