Pressure distributions of gaseous slip flow in straight and uniform rectangular microchannels

Microfluidics and Nanofluidics

Volumn 1, Issue 1, 2004, Pages 41-51

  Jang, J ^a   Wereley, S T ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

DRIE; Gaseous slip flow; Nonlinearity; Pressure distribution; Rectangular microchannel

Indexed keywords

BOUNDARY CONDITIONS; CHANNEL FLOW; NAVIER STOKES EQUATIONS; PRESSURE DISTRIBUTION; REACTIVE ION ETCHING; REYNOLDS NUMBER;

DEEP REACTIVE ION ETCHING (DRIE); GASEOUS SLIP FLOW; RECTANGULAR MICROCHANNEL;

MICROELECTROMECHANICAL DEVICES;

EID: 23844511263     PISSN: 16134982     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10404-004-0005-8     Document Type: Article

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