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Volumn , Issue , 2004, Pages 191-194
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Depletion/enhancement mode InAlAs/InGaAs - MOSHEMTs with nm - Thin gate insulating layers formed by oxidation of the InAlAs layer
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Author keywords
[No Author keywords available]
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
CHEMICAL BONDS;
ETCHING;
HIGH ELECTRON MOBILITY TRANSISTORS;
LEAKAGE CURRENTS;
OXIDATION;
PHOTOLUMINESCENCE;
TRANSCONDUCTANCE;
NITRIDATION;
OXINITRIDATION;
PHOTOLUMINESCENCE INTENSITY;
PHOTOLUMINESCENCE SPECTRA;
SEMICONDUCTING INDIUM COMPOUNDS;
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EID: 23744486677
PISSN: 10928669
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (2)
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References (5)
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