Diffusion of indium implanted in silicon: The effect of the pre-amorphisation treatment and of the presence of carbon

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 237, Issue 1-2, 2005, Pages 88-92

  Gennaro, S ^a   Barozzi, M ^a   Bersani, M ^a   Sealy, B J ^b   Gwilliam, R ^b  

^a ITC IRST   (Italy)

^b UNIVERSITY OF SURREY   (United Kingdom)

Author keywords

Carbon; Diffusion; Indium; Ion implantation; Silicon

Indexed keywords

AMORPHIZATION; CARBON; COBALT; DIFFUSION; INDIUM; ION IMPLANTATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY;

CO-IMPLANTED SPECIES; DIFFUSION BEHAVIOR; DOPANTS; PRE-AMORPHIZATION DAMAGE;

SILICON;

EID: 23444434379     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.04.083     Document Type: Conference Paper

References (10)

1. E. Napolitani, A. Carnera, E. Schroer, V. Privitera, F. Priolo, and S. Moffatt Appl. Phys. Lett. 75 1999 1869
2. C.P. Parry, T.E. Whall, and EH.C. Parker J. Appl. Phys. 82 1997 4990
3. P.B. Griffin, M. Cao, P. Vande Voorde, Y.-L. Chang, and W.M. Greene Appl. Phys. Lett. 73 1998 2986
4. S. Gennaro, E. Collart, Y. Wang, B.J. Sealy, and R.M. Gwilliam Nucl. Instr. and Meth. B 209 2003 136
5. S. Gennaro, B.J. Sealy, C. Jeynes, E.J.H. Collart, A. Licciardello, R. Gwilliam, in: Proceedings of 14th International Conference on Ion Implantation Technology (IIT 2002, Taos, NM, USA), IEEE Piscataway (NJ) USA, 2003, p. 552.
6. S. Gennaro, E. Collart, B. Sealy, R. Gwilliam, USJ2003, in: Proceedings 7th International Workshop on the Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semiconductors, Santa Cruz, California, USA, 27 April-01 May 2003.
7. H. Graoui, A. Al-Bayati, A. Erlebach, C. Zechner, F. Benistant, A. Allen, P. Banks, A. Murrell, in: Proceedings 14th International Conference on Ion Implantation Technology (IIT 2002, Taos, NM, USA), IEEE Piscataway (NJ) USA, 2003, p. 12.
8. P.B. Griffin, M. Cao, P. Vande Voorde, Y.-L. Chang, and W.M. Greene Appl. Phys. Lett. 73 2986 1998
9. E. Napolitani, A. Coati, D. De Salvador, A. Carnera, S. Mirabella, S. Scalese, and F. Priolo Appl. Phys. Lett. 79 2001 4145
10. R. Baron, J.P. Baukus, S.D. Allen, T.C. McGill, H. Kimura, H.V. Winston, and O.J. Marsh Appl. Phys. Lett. 34 1979 257