Growth and characterization of three-dimensional SiC nanostructures on Si

Materials Science Forum

Volumn 389-393, Issue 1, 2002, Pages 747-750

  Cimalla, Volker ^a   Zekentes, Konstantinos ^a  

^a INSTITUTE OF COMPUTER SCIENCE   (Greece)

Author keywords

Atomic force microscopy; Grain density; Islands; Nanostructures; Nucleation

Indexed keywords

ATOMIC FORCE MICROSCOPY; GRAIN BOUNDARIES; GROWTH (MATERIALS); NANOSTRUCTURES; NUCLEATION; THREE DIMENSIONAL; NANOCLUSTERS;

CARBON FLUX; GRAIN DENSITY; ISLANDS; CARBON FLUXES; PRE-DEPOSITION; SI SUBSTRATES; THREE-DIMENSIONAL STRUCTURE;

SILICON CARBIDE;

EID: 2342667966     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.389-393.747     Document Type: Article

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