Surface roughness of sputtered [Formula Presented] films studied by atomic force microscopy and spectroscopic light scattering

Physical Review E - Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics

Volumn 54, Issue 4, 1996, Pages 4021-4026

  Ronnow D ^a   Isidorsson, J ^a   Niklasson, G A ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0007960467     PISSN: 1063651X     EISSN: None     Source Type: Journal    
DOI: 10.1103/PhysRevE.54.4021     Document Type: Article

References (26)

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