Transient heating study of microhotplates by using a high-speed thermal imaging system

Annual IEEE Semiconductor Thermal Measurement and Management Symposium

Volumn , Issue , 2002, Pages 92-98

  Afridi, M ^a   Berning, D ^a   Hefner, A ^a   Suehle, J ^a   Zaghloul, M ^a   Kelley, E ^a   Parrilla, Z ^a   Ellenwood, C ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; HEATING; INFRARED IMAGING; INFRARED RADIATION; SENSORS; TEMPERATURE DISTRIBUTION;

HIGH-SPEED THERMAL IMAGING SYSTEMS; MICROHOTPLATE DEVICES;

MICROELECTROMECHANICAL DEVICES;

EID: 0036217559     PISSN: 10652221     EISSN: None     Source Type: Journal    
DOI: 10.1109/STHERM.2002.991352     Document Type: Article

References (10)

1. An integrated low-power thin-film CO gas sensor on silicon
2. Micromachined thermal radiation emitter from a commercial CMOS process
3. A high-speed thermal imaging system for semiconductor device analysis
4. A new approach for the fabrication of micromachined structures
5. Tin oxide gas sensor fabricated using CMOS microhotplates and in-situ processing
6. A CMOS thermally isolated gas flow sensor
7. A CMOS compatible thermally excited silicon oxide beam resonator with aluminum mirror
8. Thermoelectric AC power sensor by CMOS technology
9. Implementation of CMOS compatible conductance-based micro-gas-sensor system
10. Fast temperature programmed sensing for micro-hotplate gas sensors