Mechanical properties of polyhedral oligomeric silsesquioxane (POSS) thin films submitted to Si irradiation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 218, Issue 1-4, 2004, Pages 375-380

  Foerster, C E ^a   Serbena, F C ^a   Garcia, I T S ^b   Lepienski, C M ^c   Roman, L S ^c   Galvao J R ^d   Zawislak, F C ^d  

^a STATE UNIVERSITY OF PONTA GROSSA   (Brazil)

^b FEDERAL UNIVERSITY OF PELOTAS   (Brazil)

^c FEDERAL UNIVERSITY OF PARANÁ   (Brazil)

^d FEDERAL UNIVERSITY OF RIO GRANDE DO SUL   (Brazil)

Author keywords

Ion implantation; Mechanical properties; Nanoindentation; POSS

Indexed keywords

ELASTIC MODULI; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HARDNESS; INDENTATION; ION BOMBARDMENT; ION IMPLANTATION; PLASTIC FILMS; RAMAN SPECTROSCOPY;

ELASTIC RECOIL DETECTION ANALYSIS; NANOINDENTATION; POSS;

THIN FILMS;

EID: 2342595191     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2004.01.011     Document Type: Conference Paper

References (15)

1. Pivin J.C., Colombo P. J. Mater. Sci. 32:1997;6163.
2. Harrison P.G. J. Organomet. Chem. 542:1997;141.
3. Lorenz V., Spoida M., Fischer A., Edelmann F.T. J. Organomet. Chem. 625:2001;1.
4. Pyun J., Matyjaszewski K., Wu J., Kim G.-M., Chun S.B., Mather P.T. Polymer. 44:2003;2739.
5. Morgen M., Ryan E.T., Zhao J.-H., Hu C., Cho T., Ho P.S. Annu. Rev. Mater. Sci. 30:2000;645.
6. Venkatesan T. Nucl. Instr. and Meth. B. 7-8:1985;461.
7. Burkey D.D., Gleason K.K. J. Appl. Phys. 93(9):2003;5143.
8. Pivin J.C. Thin Solid Films. 263:1995;185.
9. Pivin J.C., Brusatin G., Zalczer G. Thin Solid Films. 287:1996;65.
10. Ferrari A.C., Robertson J. Phys. Rev. B. 61(20):2000;14095.
11. Pignataro B., Pivin J.-C., Marletta G. Nucl. Instr. and Meth. B. 191:2002;772.
12. Oliver W.C., Pharr G.M. J. Mater. Res. 7:1992;1564.
13. Brotzen F.R. Int. Mater. Rev. 39:1994;25.
14. Lopes J.M.J., Foerster C.E., Serbena F.C., Lepienski C.M., Baptista D.L., Zawislak F.C. Nucl. Instr. and Meth. B. 175-177:2001;673.
15. Foerster C.F., Garcia I.T.S., Zawislak F.C., Serbena F.C., Lepienski C.M., Schreiner W.H., Abate M. Thin Solid Films. 411:2002;256.