Ion irradiation effects on hardness and elastic modulus in AZ 1350Jphotoresist film

Thin Solid Films

Volumn 411, Issue 2, 2002, Pages 256-261

  Foerster, C E ^a   Garcia, I T S ^b   Zawislak, F C ^c   Serbena, F C ^a   Lepienski, C M ^d   Schreiner, W H ^d   Abbate, M ^d  

^a STATE UNIVERSITY OF PONTA GROSSA   (Brazil)

^b Mestrado em Avaliacao de Impactos Ambientais em Mineracao Victor Barreto   (Brazil)

^c FEDERAL UNIVERSITY OF RIO GRANDE DO SUL   (Brazil)

^d FEDERAL UNIVERSITY OF PARANÁ   (Brazil)

Author keywords

Hardness; Ion irradiation; Nanoindentation; Photoresist

Indexed keywords

CROSSLINKING; ELASTIC MODULI; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INDENTATION; IRRADIATION; MICROHARDNESS; PHOTORESISTORS; RAMAN SPECTROSCOPY; RUTHERFORD BACKSCATTERING SPECTROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

ION IRRADIATION; NANOINDENTATION; POLYMER MATERIALS; POLYMERIC FILMS;

THIN FILMS;

EID: 2342448612     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00281-X     Document Type: Article

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