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Volumn 1, Issue 2, 2004, Pages 401-404
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Revealing of threading and misfit dislocations in partially relaxed InGaAs/GaAs heterostructures
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Author keywords
[No Author keywords available]
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Indexed keywords
ANISOTROPY;
ATOMIC FORCE MICROSCOPY;
CRYSTAL LATTICES;
CRYSTALLOGRAPHY;
ELECTROLUMINESCENCE;
ELECTRONIC STRUCTURE;
ENERGY DISPERSIVE SPECTROSCOPY;
EPITAXIAL GROWTH;
INDIUM COMPOUNDS;
INTERFACES (MATERIALS);
LIGHT EMITTING DIODES;
SEMICONDUCTOR MATERIALS;
SURFACE PHENOMENA;
ULSI CIRCUITS;
X RAY DIFFRACTION ANALYSIS;
CROSS-HATCH PATTERN;
ETCH PIT DENSITY (EPD);
MISFIT LOCATIONS;
THREADING DISLOCATION;
DISLOCATIONS (CRYSTALS);
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EID: 2342557268
PISSN: 16101634
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1002/pssc.200303954 Document Type: Conference Paper |
Times cited : (9)
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References (11)
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