Dislocations in microelectronics

Physica Status Solidi (A) Applied Research

Volumn 171, Issue 1, 1999, Pages 371-376

  Mil'Shtein, S ^a  

^a University of Massachusetts   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIPOLAR TRANSISTORS; DISLOCATIONS (CRYSTALS); FIELD EFFECT TRANSISTORS; MICROPROCESSOR CHIPS; SEMICONDUCTOR DIODES;

MICROMINIATURIZATION;

MICROELECTRONIC PROCESSING;

EID: 0032754424     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1521-396X(199901)171:1<371::AID-PSSA371>3.0.CO;2-Y     Document Type: Article

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