Formation of transition metal silicides by high energy ion beam mixing in Mn/Si and Ni/Si single and multilayer samples

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 217, Issue 4, 2004, Pages 589-597

  Chaudhuri, S ^a   Biswas, S ^a   Gupta, A ^b   Avasthi, D K ^c   Bhattacharyya, D ^c   Teichert, S ^d   Sarkar, D K ^a  

^a UNIVERSITY OF KALYANI   (India)

^b UGC DAE CONSORTIUM FOR SCIENTIFIC RESEARCH   (India)

^c INTER UNIVERSITY ACCELERATOR CENTRE   (India)

^d CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Silicides

Indexed keywords

CRYSTALLINE MATERIALS; DIFFERENTIAL EQUATIONS; DIFFUSION; HEAVY IONS; INTEGRATED CIRCUITS; ION BEAMS; IONIZATION; IRRADIATION; METALLIZING; MULTILAYERS; THERMAL CONDUCTIVITY; ULSI CIRCUITS; X RAY DIFFRACTION ANALYSIS;

COUPLING FACTOR; ELECTROMIGRATION RESISTANCE; FREE ELECTRON THEORY; SILICIDES;

TRANSITION METALS;

EID: 2342534531     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2003.12.020     Document Type: Article

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