Ion beam mixing and room temperature silicidation of Cu/Si(111) system by Ar+ ion irradiation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 161, Issue , 2000, Pages 992-996

  Sarkar, D K ^a   Dhara, S ^b   Nair, K G M ^b   Chaudhury, S ^c  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^b INDIRA GANDHI CENTRE FOR ATOMIC RESEARCH   (India)

^c UNIVERSITY OF KALYANI   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; COPPER; CRYSTALLINE MATERIALS; EVAPORATION; ION BEAMS; ION BOMBARDMENT; MATHEMATICAL MODELS; MIXING; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON; TEMPERATURE; X RAY DIFFRACTION;

ANDERSONS CASCADE MIXING MODEL; CRYSTALLINE PHASE FORMATION; GRAZING INCIDENCE X RAY DIFFRACTION; ION BEAM MIXING; ROOM TEMPERATURE SILICIDATION; THERMAL EVAPORATION;

THIN FILMS;

EID: 0033878907     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(99)00774-0     Document Type: Article

References (21)

1. J.W. Mayer, S.S. Lau, in: J.M. Poate, G. Foti, D.C. Jacobson (Eds.), Surface Modification and Alloying by Laser, Ion and Electron Beams, Plenum Press, New York, 1983, p. 241.
2. A. Gras-Marti, U. Littmark, in: R. Kelly, M.F. Da Silva (Eds.), Materials Modification by High-Fluence Ion Beams, Kluwer Academic, Dordrecht, 1987, p. 257.
3. P. Sigmund, A. Gras-Marti, Nucl. Instr. and Meth. 182-183 (1981) 25.
4. A.J. Abu El-Hija, K.A. Al-Saleh, N.A. Halim, J.M. Khalifeh, N.S. Saleh, Phys. Stat. Sol. A 107 (1988) 253.
5. E.M. Spilevesky, M.E. Shpilevsky, M.A. Andreev, Surf. Coating Technol. 74-75 (1995) 937.
6. C.-A. Chang, J. Appl. Phys. 67 (1990) 566.
7. C.A. Achete, F.L. Freire Jr., G. Marotto, E. Zanghellini, Mater. Lett. 18 (1994) 218.
8. A. Cros, M.O. Abolelfotoh, K.N. Tu, J. Appl. Phys. 67 (1990) 3328.
9. M. Nastasi, J.W. Mayer, Mater. Sci. Engrg. R 12 (1994) 1.
10. H.H. Anderson, Appl. Phys. 18 (1979) 131.
11. JCPDS card number 04-0836.
12. K.P. Mukharjee, J. Bandyopadhyaya, K.P. Gupta, Trans. Met. Soc. AIME 245 (1969) 2335.
13. JCPDS card numbers 03-0990, 04-0841, 23-0222, 23-0223 and 23-0224.
14. S. Dhar, T. Som, Y.N. Mohapatra, V.N. Kulkarni, Appl. Phys. Lett. 67 (1995) 1700.
15. Y.T. Cheng, M. Van Rossum, M.A. Nicolet, W.L. Johnson, Appl. Phys. Lett. 45 (1984) 185.
16. B.X. Liu, Phys. Stat. Sol. (A) 94 (1986) 11.
17. G.S. Was, Proc. Surf. Sci. 32 (1990) 211.
18. A.R. Miedema, R. Boom, F.R. De Boer, J. Less Common Metals 41 (1975) 283.
19. A.R. Miedema, J. Less Common Metals 46 (1976) 67.
20. D.K. Sarkar, S. Bera, S. Dhara, K.G.M. Nair, S.V. Narasimhan, S. Chowdhury, Appl. Surf. Sci. 120 (1997) 159.
21. D.K. Sarkar, S. Bera, S. Dhara, S.V. Narasimhan, S. Chowdhury, K.G.M. Nair, Solid State Commun. 105 (1998) 351.