3DX: A micro-machined silicon crystallographic X-ray detector

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4784, Issue , 2003, Pages 365-374

  Morse, John ^a   Kenney, Christopher J ^a   Westbrook, Edwin M ^a   Naday, Istvan ^b   Parker, Sherwood I ^c  

^a Molecular Biology Consortium   (United States)

^b ARGONNE NATIONAL LABORATORY   (United States)

^c UNIVERSITY OF HAWAII   (United States)

Author keywords

Crystallography; Diffraction; Pixel detector; Plasma etching; Silicon; X ray

Indexed keywords

CRYSTALLOGRAPHY; DIFFRACTION; ELECTRIC FIELDS; ELECTRODES; GAMMA RAYS; INDUCTIVELY COUPLED PLASMA; PILES; PIXELS; PLASMA ETCHING; POLYCRYSTALLINE MATERIALS; POLYSILICON; READOUT SYSTEMS; SILICON; SILICON DETECTORS; SILICON WAFERS; X RAY CRYSTALLOGRAPHY; X RAYS;

CRYSTALLINE SILICONS; DETECTOR SENSITIVITY; GEOMETRIC DISTORTION; HIGH RESISTIVITY; INTEGRATION METHOD; MACROMOLECULAR CRYSTALLOGRAPHY; PIXEL DETECTOR; READOUT INTEGRATED CIRCUITS;

X RAY DETECTORS;

EID: 2342498573     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.451164     Document Type: Conference Paper

References (22)

1. E. Westbrook, I. Naday, Meth. In Enzymology, 276, pp. 244-268, 1997
2. E. Westbrook, I. Naday, R. Fischer, S. Onishi, D. Osten, R. Bruker, in these proceedings.
3. Ch. Bronniman, S. Florin, M. Lindner, B. Schmitt, C. Schulze-Briese, J. Synchrotron Rad. 7, pp. 301-306, 2000
4. J.-F. Berar, L. Blanquart, N. Boudet, P. Breugnon, B. Caillot, J.-C. Clemens, P. Delpierre, I. Koudobine, C. Mouget, R. Potheau, I. Valin, J. Appl. Cryst., 2002, in press
5. C. Ponchut, J. L. Visschers, A. Fornaini, H. Graafsma, M. Mairorino, G. Mettivier, D. Calvet, Nucl. Instrum. and Meth. A, 484, 1-3 pp. 396-406, 2002
6. E. Beuville, J. Beche, C. Cork, V. Douence, T. Earnest, J. Millaud, D. Nygren, H. Padmore, N. Xuong, P. Datte, Nucl. Instrum. and Meth. A, 395, pp. 429-434, 1997
7. P. Sellin, G. Rossi, M. Renzi, A. Knights, E. Eikenberry, M. Tate, S. Barna, R. Wixted, S. Gruner, Nucl. Instrum. and Meth. A 460, pp. 207-212, 2001
8. P. Seller, G. Derbyshire, G. Hall, G. Iles, A. Jorden, P. Murray, M. Prydderch, S. Passmore, K. Smith, S. Thomas, Nucl. Instrum. and Meth. A 455, pp. 715-720, 2000
9. S. Parker, C. Kenney, J. Segal, Nucl. Instrum. and Meth. A395, pp. 328-343, Aug. 1997
10. C. Kenney, S. Parker, J. Segal, C. Storment, IEEE Trans. Nucl. Sci. 46 No. 4, pp. 1224-1236, Aug. 1999
11. G. lies, K. Mathieson, P. Murray, S. Passmore, M. Prydderch, P. Seller, S. Thomas, Nucl. Instrum. and Meth. A, Vol. 458 (1-2) (2001) pp. 427-430
12. Surface Technology Systems, Imperial Park, Newport, UK, http://www.stsystems.com
13. F. Larem, A. Schilp, Patents DE4241045, US 5501893, EP625285
14. C. Kenney, S. Parker, IEEE Trans. Nucl. Sci. 48 No. 5, pp. 1629-1638, Oct. 2001
15. C. Kenney, S. Parker, E. Walckiers, IEEE Trans. Nucl. Sci. 48 No. 6, pp. 2405-2410, Dec. 2001
16. C. Kenney, S. Parker, E. Walckiers, IEEE Trans. Nucl. Sci. 48 No. 2, pp. 189-193, Apr. 2001
17. M. Chmeissani, B. Mikulec, Nucl. Instrum. and Meth. A 460 pp. 81-90, 2001
18. M. Garcia-Sciveres, O. Milgrome, T. Zimmerman, I. Volobouev, R. Ely, A. Connolly, D. Fish, T. Affolder, A. Sill, Nucl. Instrum. and Meth. A 435, pp. 58-64, 1999
19. H. Spieler "Introduction to Radiation Resistant Semiconductor Devices and Circuits", http://www.physics.lbl.gov/-spieler/radiation-effects/rad-tutor.pdf
20. G. Summers, IEEE Trans. Nucl. Sci. 40, pp. 1372-1380, 1999
21. S. Parker, C. Kenney, Nucl. Instrum. and Meth. A465, pp. 101-107, 2001
22. M. Campbell, G. Anelli, M. Burns, E. Cantatore, L. Casagrande, M. Delmastro, R. Dinapoli, F. Faccio, E. Heijne, P. Jarron, M. Luptak, A. Marchioro, P. Martinengo, D. Minervini, M. Morel, E. Pernigotti, I. Ropotar, W. Snoeys, K. Wyllie, IEEE Trans. Nucl. Sci. 46, pp. 156-160, 1999