Charge compensation in irradiated semiconductor devices using high-resistivity field plates

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 465, Issue 1, 2001, Pages 101-107

  Parker, Sherwood ^b   Kenney, Christopher ^a  

^a UNIVERSITY OF HAWAII   (United States)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

Charge compensation; Field plates; Oxide trapped charge; Polysilicon resistors; Radiation damage; Semiconductor radiation detectors; Sensors

Indexed keywords

CAPACITANCE; ELECTRODES; POLYSILICON; RADIATION DAMAGE; RESISTORS; SENSORS;

SEMICONDUCTOR RADIATION DETECTORS;

PARTICLE DETECTORS;

EID: 0035366779     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-9002(01)00363-1     Document Type: Article

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