Fabrication of three dimensional microstructures by stacking laser-direct-write layers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5063, Issue , 2003, Pages 44-48

  Jeong, Sungho ^a   Han, Seongil ^a   Selvan, J Senthil ^a  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

Author keywords

Laser direct writing; LCVD; Microfabrication; Microstructure; Three dimensional

Indexed keywords

ARGON; CARBON; CHEMICAL VAPOR DEPOSITION; ETHYLENE; LASER APPLICATIONS; MICROSTRUCTURE; PHOTOLITHOGRAPHY; SOLENOIDS;

LASER DIRECT WRITING; LASER-ASSISTED CHEMICAL VAPOR DEPOSITION (LCVD); MICROFABRICATION; THREE DIMENSIONAL ANALYSIS;

LASER BEAMS;

EID: 2342469412     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.541056     Document Type: Conference Paper

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