Electrostatic probe measurements in an expanding microwave discharge sustained in an Ar-N2-H2 gas mixture: Investigation on plasma parameters

Journal of Physics D: Applied Physics

Volumn 37, Issue 8, 2004, Pages 1241-1247

  Jauberteau, J L ^a   Jauberteau, I ^a   Aubreton, J ^a  

^a UNIVERSITY OF LIMOGES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; CORROSION RESISTANCE; ELECTRIC INSULATORS; ELECTRIC REACTORS; ELECTROMAGNETIC WAVE PROPAGATION; ELECTRON ENERGY ANALYZERS; INERT GASES; IONIZATION OF GASES; MAGNETRON SPUTTERING; MATHEMATICAL MODELS; MAXWELL EQUATIONS; NITRIDING; STAINLESS STEEL; SUBSTRATES;

ELECTRON ENERGY DENSITY FUNCTION (EEDF); GAS MIXTURES; MICROWAVE DISCHARGES; PLASMA EXPANSION;

MICROWAVES;

EID: 2342464188     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/37/8/013     Document Type: Article

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