Expanding microwave plasma for steel carburizing: role of the plasma impinging species on the steel surface reactivity

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 1, 2000, Pages 108-114

  Aubreton, J ^a  

^a UNIVERSITY OF LIMOGES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CARBURIZING; DIFFUSION IN SOLIDS; ELECTRIC DISCHARGES; METHANE; MICROWAVES; MIXTURES; NUMERICAL METHODS; OXIDES; SECONDARY ION MASS SPECTROMETRY; STEEL; SURFACE TREATMENT;

FICK SECOND LAW; MICROWAVE PLASMA; MICROWAVE PLASMA REACTOR; PLASMA THERMOCHEMICAL TREATMENTS;

PLASMA APPLICATIONS;

EID: 0033706527     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582126     Document Type: Article

References (2)

1. T. Bell, P. A. Dearnley, and J. Lanagan, Proceedings of 14th Symposium on Physics of Ionizing Gases, 1989, pp. 305-347.
2. T. Bell and A. M. Staines, High Temp. Technol. 1, 209 (1983).