Measurement of duty cycles of photoresist grating masks made on top of multilayer dielectric stacks

Applied Optics

Volumn 44, Issue 21, 2005, Pages 4494-4500

  Li, Lifeng ^a   Zeng, Lijiang ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETIC FIELDS; HOLOGRAPHY; LIGHT PROPAGATION; OPTICAL WAVEGUIDES; PHOTORESISTS; REFRACTIVE INDEX; SCANNING ELECTRON MICROSCOPY; THIN FILMS;

DIELECTRIC STACKS; GRATING THEORY; ION BEAM ETCHING; SURFACE-RELIEF REFLECTION GRATINGS;

DIFFRACTION GRATINGS;

EID: 23344439951     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.44.004494     Document Type: Article

References (16)

1. M. D. Perry, R. D. Boyd, J. A. Britten, D. Decker, B. W. Shore, C. Shannon, E. Shults, and L. Li, "High-efficiency multilayer dielectric diffraction gratings," Opt. Lett. 20, 940-942 (1995); erratum 20, 1513 (1995).
2. B. W. Shore, M. D. Perry, J. A. Britten, R. D. Boyd, M. D. Feit, H. Nguyen, R. Chow, G. Loomis, and L. Li, "Design of high efficiency dielectric reflection gratings," J. Opt. Soc. Am. A14, 1124-1136 (1997).
3. K. Hehl, J. Bischoff, U. Mohaupt, M. Palme, B. Schnabel, L. Wenke, R. Bödefeld, W. Theobald, E. Welsch, R. Sauerbrey, and H. Heyer, "High-efficiency dielectric reflection gratings: design, fabrication, and analysis," Appl. Opt. 38, 6257-6271 (1999).
4. M. Breidne and D. Maystre, "Equivalence of ruled, holographic, and lamellar gratings in constant deviation mountings," Appl. Opt. 19, 1812-1820 (1980).
5. C. J. Raymond, M. R. Murnane, S. S. H. Naqvi, and J. R. McNeil, "Metrology of subwavelength photoresist gratings using optical scatterometry," J. Vac. Sci. Technol. B 13, 1484-1495 (1995).
6. C. J. Raymond, M. R. Murnane, S. L. Prins, S. S. H. Naqvi, J. R. McNeil, and J. W. Hosch, "Multiparameter grating metrology using optical scatterometry," J. Vac. Sci. Technol. B 15, 361-368 (1997).
7. E. M. Drège, J. A. Reed, and D. M. Byrne, "Linearized inversion of scatterometric data to obtain surface profile information," Opt. Eng. 41, 225-236 (2002).
8. H.-T. Huang and F. L. Terry, Jr., "Spectroscopic ellipsometry and reflectometry from gratings (scatterometry) for critical dimension measurement and in situ, real-time process monitoring," Thin Solid Films 455-456, 828-836 (2004).
9. J. R. Marciante, N. O. Farmiga, J. I. Hirsh, M. S. Evans, and H. T. Ta, "Optical measurement of depth and duty cycle for binary diffraction gratings with subwavelength features," Appl. Opt. 42, 3234-3240 (2003).
10. L. Li, "Determination of bound modes of multilayer planar waveguides by integration of an initial-value problem," J. Opt. Soc. Am. A 11, 984-991 (1994).
11. T. Tamir, "Inhomogeneous wave types at planar interfaces. III. Leaky waves," Optik 38, 269-297 (1973).
12. T. Tamir, "Leaky waves in planar optical waveguides," Nouv. Rev. Opt. 6, 273-284 (1975).
13. T. Tamir and F. Y. Kou, "Varieties of leaky waves and their excitation along multilayered structures," IEEE J. Quantum Electron. 22, 544-551 (1986).
14. T. Tamir and S. Zhang, "Resonant scattering by multilayered dielectric gratings," J. Opt. Soc. Am. A 14, 1607-1616 (1997).
15. M. Nevière, "The homogeneous problem," in Electromagnetic Theory of Gratings, R. Petit, ed. (Springer-Verlag, 1980), pp. 123-157.
16. A. Hessel and A. A. Oliner, "A new theory of Wood's anomaly on optical gratings," Appl. Opt. 4, 1275-1297 (1965).