Micro-assembly and packaging of MEMS using optically transparent electrostatic gripper

American Society of Mechanical Engineers, Manufacturing Engineering Division, MED

Volumn 15, Issue , 2004, Pages 511-518

  Enikov, Eniko T ^a   Minkov, Lyubomir ^a  

^a University of Arizona   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EPITAXIAL LIFT-OFF (ELO); MICRO-ASSEMBLY; OPTICALLY TRANSPARENT ELECTROSTATIC GRIPPERS; POSITION SENSITIVE DETECTORS;

ALGORITHMS; ASPECT RATIO; ASSEMBLY; CHARGE COUPLED DEVICES; COMPUTER SIMULATION; COMPUTER VISION; ELECTROSTATICS; GRIPPERS; IMAGE PROCESSING; PHOTOLITHOGRAPHY;

MICROELECTROMECHANICAL DEVICES;

EID: 23244458721     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2004-60441     Document Type: Conference Paper

References (14)

1. D. Kugelmann, Autonomous robotic handling applying sensor systems and 3D simulation, in: Proc. 1994 IEEE Int. Conf. on Robotics and Automation, San Diego, California, pp. 196-201 (1994).
2. G. D. Hager, W.-C. Chang and A. S. Moore, Robot feedback control based on stereo vision: towards calibration-free hand-eye coordination, in: Proc. 1994 Int. Conf. on Robotics and Automation, San Diego, California, pp. 2850-2856 (1994).
3. S. Wang, R. Cromwell, A. Kak, A., I. Kimura and M. Osada, Model-based vision for robotic manipulation of twisted tubular parts: using affine transforms and heuristic search, Proc. 1994 Int. Conf. on Robotics and Automation, San Diego, California, pp. 208-215 (1994).
4. B. J. Nelson and P.K. Khosla, "Visually Servoed Manipulation Using Active Camera," Proc. Thirthy-Third Annual Allerton Conf. On Communication, Control, and Computing, University of Illinois at Urbana Champaign. Oct. 4-6, 1995 see program
5. N. Papanikolopoulos Selection of features and evaluation of visual measurements during robotic visual servoing tasks, J. Intelligent Robotic Systems 13 (3), 279-304 (1995).
6. B. Vikramaditya and B. J. Nelson, Visually guided microassembly using optical microscopes and active vision techniques, in: Proc. 1997 IEEE Int. Conf. on Robotics and Automation, Albuquerque, New Mexico, pp. 3172-3177 (1997).
7. B. Nelson, N. Papanikolopoulos, and P. K. Khosla, Visual servoing for robotic assembly, in: Visual Servoing, K. Hashimoto (Ed.), Series in Robotics and Automation, Vol. 7, pp. 139-164, Word Scientific Publishing, (1993).
8. Vikramaditya, B., Nelson, BJ., Yang G. and Enikov, ET., Microassembly of hybrid magnetic MEMS, Journal of Micromechatronics, v. 1(2) pp. 99-116, 2000
9. B. Corbett, K. Rodgers, F.A. Stam, D. O'Connell, P.V. Kelly, G.M. Crean, Low-stress hybridisation of emitters, detectors and driver circuitry on a silicon motherboard for optoelectronic interconnect architecture, Material Science in Semiconductor Processing 3 (2000) 449-453.
10. Enikov, ET, Lazarov, KV, Optically Transparent Gripper for Microassembly, Microrobotics and Microassembly III, Proceedings of SPIE Vol. 4568,pp. 40-49, 2001
11. A virtual reality teleoperated interface for assembly of hybrid MEMS prototypes, Proceedings of the Design Engineering Technical Conference (DETC), September 13-16, Atlanta, GA, ASME, 1998
12. Enikov, E. and Stepan, G., Microchaotic Motion of Digitally Controlled Machines, Journal of Vibration and Control, v. 4 (4), p. 427-443, 1998
13. Kuo, B.C. Digital Control Systems, SRL publishing, Champaign, IL, 1977
14. Kamran S. Mobarhan, Ph.D., Martin Hagenbuechle, Ph.D., and Randy Heyler, Fiber to Waveguide Alignment Algorithm, Newport Corporation, Irvine, California