A low-cost high-performance cleanroom enclosure

IEEE Transactions on Education

Volumn 42, Issue 2, 1999, Pages 144-146

  Hutchins, J B ^b   Martin, M D ^b   Belolipetskiy, S ^b   Cox Jr , H L ^a,c   Pitts, W K ^a,b   Wash, K M ^a,c  

^a IEEE

^b UNIVERSITY OF LOUISVILLE   (United States)

^c University of Louisville   (United States)

Author keywords

Cleanroom; Laser fabrication; Microelectronics

Indexed keywords

CLEAN ROOMS; COST EFFECTIVENESS; ELECTRONIC EQUIPMENT MANUFACTURE; LASERS; MICROELECTRONICS; MICROMACHINING;

LASER FABRICATION;

ENGINEERING EDUCATION;

EID: 0032623661     PISSN: 00189359     EISSN: None     Source Type: Journal    
DOI: 10.1109/13.762951     Document Type: Article

References (7)

1. W. K. Pitts, K. M. Walsh, and H. L. Cox, Jr., Development of Microfabricated Radiation Sensor Systems, DoD Grant DAAH04-96-1-0418.
2. Clean Air Products, Minneapolis, MN.
3. Clean-Room Products, Inc., Ronkenkoma, NY.
4. Chemical Resistant Neoprene Sealant, Acramax Technologies, Media, PA.
5. Unistrut Corporation, Itasca, IL 60143.
6. Laminators, Inc., Hatfield, PA.
7. Model 228 Particle Concentration Meter, Met-One, Grants Pass, OR.