Plane-view observation technique of silicon nanowires by transmission electron microscopy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 5, 1999, Pages 1897-1902

  Tsutsumi, Toshiyuki ^a  

^a MEIJI UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 22844456412     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590846     Document Type: Article

References (5)

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