Performance of the trial scanning atom probe: New approach to evaluate the microtip apex

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 3, 1996, Pages 2110-2113

  Nishikawa, Osamu ^a   Iwatsuki, Masashi ^b   Aoki, Susumu ^b   Ishikawa, Yuuichi ^c  

^a KANAZAWA INSTITUTE OF TECHNOLOGY   (Japan)

^b JEOL LTD   (Japan)

^c HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000817568     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588881     Document Type: Review

References (6)

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2. O. Nishikawa, M. Kimoto, M. Iwatsuki, and Y. Ishikawa, J. Vac. Sci. Technol. B 13, 599 (1995).
3. E. W. Müller and T. T. Tsong, Field Ion Microscopy, Principles and Applications (Elsevier, New York, 1969).
4. E. W. Müller and S. V. Krishnaswamy, Rev. Sci. Instrum. 39, 83 (1968).
5. O. Nishikawa, K. Kurihara, M. Nachi, M. Konishi, and M. Wada, Rev. Sci. Instrum. 52, 810 (1981).
6. R. Young, J. Ward, and F. Scire, Rev. Sci. Instrum. 43, 999 (1972).