Methane adsorption and hydrogen desorption kinetics during diamond gas source molecular beam epitaxy

New Diamond and Frontier Carbon Technology

Volumn 6, Issue 5, 1996, Pages 301-310

  Nishimori, Toshihiko ^a   Sakamoto, Hitoshi ^a   Takakuwa, Yuji ^b   Kono, Shozo ^b  

^a MITSUBISHI HEAVY INDUSTRIES LTD   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

C(001) surface; Diamond epitaxial growth; ESD; Gas source MBE; Growth rate; Hydrogen desorption; Methane; Methane adsorption; Rate limiting reaction; RHEED; SIMS; Surface hydrogen coverage; Surface segregation of hydrogen

Indexed keywords

EID: 3142637356     PISSN: 13449931     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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