High temperature reaction of nitric oxide with Si surfaces: Formation of Si nanopillars through nitride masking and oxygen etching

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 4, 1999, Pages 1346-1349

  Prabhakaran, K ^a  

^a Kashino Diverse Brain Research Laboratory of NTT Communication Science Laboratories   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 22644448747     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590758     Document Type: Article

References (19)

1. T.-C. Shen, C. Wang, G. C. Abeln, J. R. Tucker, J. W. Lyding, Ph. Avouris, and R. E. Walkup, Science 268, 1590 (1995).
2. R. C. Ashoori, Nature (London) 379, 413 (1996).
3. P. B. Fischer and S. Y. Chou, J. Vac. Sci. Technol. B 11, 2524 (1993).
4. E. Yablonovitch, T. J. Gmitter, R. D. Meade, A. M. Rappe, K. D. Brommer, and J. D. Joannopoulos, Phys. Rev. Lett. 67, 3380 (1991).
5. T. Ogino, H. Hibino, and K. Prabhakaran, J. Vac. Sci. Technol. B 14, 4234 (1996).
6. K. Prabhakaran, T. Matsumoto, T. Ogino, and Y. Masumoto, Appl. Phys. Lett. 72, 3169 (1998).
7. M. Tabe and T. Yamamoto, Appl. Phys. Lett. 69, 2222 (1996).
8. A. Kamath, D. L. Kwong, Y. M. Sun, P. M. Blass, S. Whaley, and J. M. White, Appl. Phys. Lett. 70, 63 (1997).
9. H. C. Lu, E. P. Gusev, T. Gustafsson, E. Garfunkel, M. L. Green, D. Brasen, and L. C. Feldman, Appl. Phys. Lett. 69, 2713 (1996).
10. R. I. Hegde, P. J. Tobin, K. G. Reid, B. Maiti, and S. A. Ajuria, Appl. Phys. Lett. 66, 2882 (1995).
11. CRC Handbook of Chemistry and Physics (Chemical Rubber, Boca Raton, FL, 1989), p. F-177.
12. A. Ishizaka and Y. Shiraki, J. Electrochem. Soc. 133, 666 (1986).
13. H. Hibino and T. Ogino, Appl. Phys. Lett. 67, 915 (1995).
14. L. Kubler, J. L. Bischoff, and D. Dolmont, Phys. Rev. B 38, 13113 (1988).
15. M. Tabe and T. Yamamoto, Surf. Sci. 376, 99 (1997).
16. M. Yoshimura, E. Takahashi, and T. Yao, J. Vac. Sci. Technol. B 14, 1048 (1996).
17. E. A. Khramtsova, A. A. Saranin, and V. G. Lifshits, Surf. Sci. Lett. 280, L259 (1993).
18. M. D. Wiggins, R. J. Baird, and P. Wynblatt, J. Vac. Sci. Technol. 18, 965 (1981).
19. A. G. Schrott and S. C. Fain, Jr., Surf. Sci. 111, 39 (1981).