Reduction and creation of paramagnetic centers on surfaces of three different polytypes of SiC

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 4, 1999, Pages 1627-1631

  Macfarlane, P J ^a   Zvanut, M E ^a  

^a UNIVERSITY OF ALABAMA AT BIRMINGHAM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 22644448692     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590802     Document Type: Article

References (11)

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