Electron field emission from a patterned diamondlike carbon flat cathode

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 2, 1999, Pages 311-314

  Mao, D S ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 22644448633     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590556     Document Type: Article

References (13)

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