Deposition of hydrogen-free diamond-like carbon film by plasma enhanced chemical vapor deposition

Applied Physics Letters

Volumn 68, Issue 25, 1996, Pages 3594-3595

  Park, Kyu Chang ^a   Moon, Jong Hyun ^a   Jang, Jin ^a   Oh, Myung Hwan ^b  

^a Kyung Hee University   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000512059     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116648     Document Type: Article

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