Preparation of Ba(Ti,Zr)O3 thick-film microactuators on silicon substrates by screen printing

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 5 A, 2005, Pages 3099-3102

  Sakai, Yuichi ^a   Futakuchi, Tomoaki ^a   Iijima, Takashi ^b   Adachi, Masatoshi ^c  

^a TOYAMA INDUSTRIAL TECHNOLOGY CENTER   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^c TOYAMA PREFECTURAL UNIVERSITY   (Japan)

Author keywords

BaTiO3; BaZrO3; Ferroelectrics; Microactuator; Piezoelectric; Screen printing; Thick film

Indexed keywords

BARIUM COMPOUNDS; FERROELECTRIC MATERIALS; HEATING; MICROACTUATORS; PIEZOELECTRICITY; SCANNING ELECTRON MICROSCOPY; SCREEN PRINTING; SILICON; THICK FILMS;

BATIO3; BAZRO3; FERROELECTRIC MICROACTUATORS; MICROPUMPING;

HYDROTHERMAL SYNTHESIS;

ACTUATORS; BARIUM COMPOUNDS; PIEZOELECTRICITY; SCANNING ELECTRON MICROSCOPY; SILICON; SILK SCREEN PRINTING; SYNTHESIS;

EID: 22544472141     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.44.3099     Document Type: Article

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