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Journal of Ceramic Processing Research

Volumn 6, Issue 2, 2005, Pages 101-105

Characteristics of bonding structures of diamond-like carbon films deposited by radio frequency plasma-enhanced chemical vapor deposition

(4) Choi, Bong Geun a Kim, Jae Kwang a Yang, Won Jae a Shim, Kwang Bo a

a Hanyang University (South Korea)

Author keywords

Bonding structure; Diamond like carbon; Hardness; PECVD

Indexed keywords

EID: 22144496114 PISSN: 12299162 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (7)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.